Laureates of the Japan Prize

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Jean M. J. Fréchet, Ph.D.

2013 (29th) Japan Prize Laureate

Field
Materials and Production
Achievement
Development of chemically amplified resist polymer materials for innovative semiconductor manufacturing process
Commemorative Lecture
Chemistry for Lithography
Nationality: United States of America
Date of Birth: August 18, 1944
Academic Degrees:
1967 Ingenieur-Chimiste, Institut de Chimie et Physique Industrielles, Lyon, France
1971 State University of New York, Ph.D. in Polymer Chemistry
1971 Syracuse University, Ph.D. in Organic Chemistry
Professional Career:
1973-1982 Associate/Assistant Professor of Chemistry, University of Ottawa, Canada
1979 and 1983 Visiting Scientist, IBM San Jose Research Center
1982-1987 Professor of Chemistry, University of Ottawa
1983-1987 Vice-Dean Graduate Studies & Research, University of Ottawa
1987-1995 IBM Professor of Chemistry, Cornell University
1993-1997 Peter J. Debye Chair of Chemistry, Cornell University
1996-2011 Professor of Chemistry and Chemical Engineering, H. Rapoport
Chair of Organic Chemistry, University of California, Berkeley
2011-2013 Professor of the Graduate School, University of California,Berkeley  
2000-2011 Senior Scientist, Lawrence Berkeley National Laboratory
2003-2011 Scientific Director, the Molecular Foundry Lawrence Berkeley National Laboratory
2010-Present Vice-President for Research, King Abdullah University of Science and Technology (KAUST), Saudi Arabia
Major Publications:
  1. Frechet, J. M. J. Ito, H. Willson, C. G. Sensitive Deep UV Resist Incorporating Chemical Amplification. Proceedings Microcircuit Engineering 1982, Grenoble, 260.
  2. Willson, C. G. Ito, H. Fréchet, J. M. J. Chemical Amplification in the Design of Polymers for Resist Application. Proceedings Microcircuit Engineering 1982, Grenoble, 251.
  3. Fréchet, J.M.J.; Eichler, E.; Willson, C.G.; Ito, H. Poly(p-t- butoxycarbonyl styrene): a Convenient Precursor to p-hydroxystyrene Resins. Polymer, 1983, 24, 995-1000.
  4. C. G. Willson, H. Ito, J. M. J. Fréchet, T. G. Tessier, F. M. Houlihan, Approaches toward the design of radiation-sensitive polymeric imaging systems with improved sensitivity and resolution. J. Electrochem. Soc., 133, 181 (1986)
  5. Fréchet, J.M.J.; Bouchard, F.; Houlihan, F.M.; Kryczka, B.; Eichler, E.; Willson, C.G.; Clecak, N. A new approach to imaging systems incorporating chemical amplification: synthesis and preliminary evaluation of novel resists based on tertiary copolycarbonates. J. Imaging Science, 1986, 30, 59-64.
  6. Houlihan, F.M.; Bouchard, F.; Fréchet, J.M.J.; Willson, C.G. Thermally Depolymerizable Polycarbonates.II. Synthesis of Novel Linear Tertiary Copolycarbonates by Phase-Transfer Catalysis. Macromolecules 1986, 19, 13-19.
  7. Fréchet, J.M.J.; Bouchard, F.; Eichler, E.; Houlihan, F.M.; Iizawa, T.; Kryczka, B.; Willson, C.G. Thermally Depolymerizable Polycarbonates. V. Acid Catalyzed Thermolysis of Allylic and Benzylic Polycarbonates: A New Route to Resist Imaging. Polymer Journal, 1987, 19, 31-49.
  8. MacDonald, S.A.; Allen, R.D.;  Clecak, N.J.; Willson, C.G.; Fréchet, J.M.J. A two-layer Resist System Derived from Trimethylsilylstyrene. Proc. SPIE-Int. Soc. Opt. Eng. 1986, 631, 28-33.
  9. Fréchet, J.M.J.; Eichler, E.; Stanciulescu, M.; Iizawa, T.; Bouchard, F.; Houlihan, F.M.; Willson, C.G. Acid-Catalyzed Thermolytic Depolymerization of Polycarbonates: A New Approach to Dry Developing Resist Materials. ACS Symposium Series, 1987, 346-56.
  10. Ito, H.; Willson, C.G.; Fréchet, J.M.J. Positive/Negative Mid UV Resists with High Thermal Stability. Proc. SPIE Int. Soc. Opt. Eng., 1987, 771, 24-31.
  11. Hawker, C.J.; Fréchet, J.M.J. Preparation of Polymers with Controlled Molecular Architecture: A New Convergent Approach to Dendritic Macromolecules. J. Am. Chem. Soc. 1990, 112, 7638-47.
  12. Fréchet, J.M.J.; Kryczka, B.; Matuszczcak, S.; Reck, B.; Stanciulescu, M.; Willson, C.G. Chemically Amplified Imaging Materials Based on Acid-Catalyzed Reactions of Polyesters or Electrophilic Crosslinking Processes. J. Photopolymer Science and Technology 1990, 3, 235-248.
  13. Cameron, J.F.; Fréchet, J.M.J. Photogeneration of Organic Bases From o-Nitrobenzyl Derived Carbamates. J. Am. Chem. Soc. 1991, 113, 4303-4313.
  14. Svec, F.; Fréchet, J.M.J.  Novel Continuous Rods of Macroporous Polymer as High-Performance Liquid Chromatography Separation Media. Analytical Chemistry 1992, 64, 820-822.
  15. Fréchet, J.M.J. Functional Polymers and Dendrimers: Reactivity, Molecular Architecture, and Interfacial Energy. Science, 1994, 263, 1710-1715.
  16. MacDonald, S. A.. Wilson, C. G Fréchet, J. M. J. Chemical Amplification in High-Resolution Imaging System. Acc. Chem. Res., 27, 151 (1994).
  17. Murthy, N.; Xu, M.C.; Schuck, S.; Kunisawa, J,; Shastri, N.; Fréchet, J.M.J; A New Macromolecular Delivery Vehicle for Protein-Based Vaccines: Acid DegradableProtein Loaded Microgels.2003, Proc. Nat. Acad. Sci. 2003, 100, 4995-5000.
  18. Thompson, B. C.; Fréchet, J.M.J; Polymer-fullerene composite solar cells. Angew. Chem. Int. Ed. 2008, 47, 58-77.
  19. Fox, M.E.; Szoka, F.C.; Fréchet, J.M.J.; Soluble polymer carriers for the treatment of cancer: the importance of molecular architecture.  Accounts Chem. Res. 2009. 42, 1141-1151.
  20. Beaujuge, Pierre M.; Fréchet, Jean M. J. Molecular Design and Ordering Effects in pi-Functional Materials for Transistor and Solar Cell Applications. J. Am. Chem. Soc. 2011, 133, 20009-20029
Major Honors:
  • American Chemical Society, Doolittle Award (1986)
  • American Chemical Society, ACS Award in Applied Polymer Science (1996)
  • Society of Imaging Science and Technology, Kosar Memorial Award (1999)
  • Elected Member of the US National Academy of Sciences (2000)
  • Elected Member of the US National Academy of Engineering (2000)
  • Elected Fellow of the American Academy of Art and Sciences (2000)
  • American Chemical Society, ACS Award in Polymer Chemistry (2000)
  • American Chemical Society, Cope Scholar Award (2001)
  • Chemical Communications 40th Anniversary Award (2005)
  • Esselen Award for Chemistry in the Service of the Public. (2005)
  • Macro Group UK Medal (2006)
  • Dickson Prize in Science (2007)
  • Arthur C. Cope Award American Chemical Society (2007)
  • Herman Mark Award, American Chemical Society (2009)
  • Nagoya Gold Medal (2009)
  • Elected to Academia Europaea (2010)
  • Society of Polymer Science of Japan, International Award (2010)
  • Erasmus Medal of the Academia Europaea (2010)
  • Grand Prix de la Maison de la Chimie (Paris) (2010)

( At the time of receipt of the Prize )

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