Laureates of the Japan Prize

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C. Grant Willson, Ph.D.

2013 (29th) Japan Prize Laureate

Field
Materials and Production
Achievement
Development of chemically amplified resist polymer materials for innovative semiconductor manufacturing process
Commemorative Lecture
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Nationality: United States of America
Date of Birth: March 30, 1939
Academic Degrees:
1962 University of California, Berkeley BS in Chemistry
1969 California State University, San Diego MS in Organic Chemistry
1973 University of California, Berkeley PhD in Organic Chemistry
Professional Career:
1973-1974 Assistant Professor, California State University, Long Beach
1974-1978 Assistant Professor, University of California, San Diego
1978-1993 IBM Fellow and Manager of the Polymer Science and Technology, IBM San Jose Research Center
1993-Present Professor of Chemistry and Chemical Engineering Rashid Engineering Regent's Chair
Department of Chemistry and Biochemistry McKetta Department of Chemical Engineering The University of Texas at Austin
Major Publications:
  1. Frechet, J. M. J. Ito, H. Willson, C. G. Sensitive Deep UV Resist Incorporating Chemical Amplification. Proceedings Microcircuit Engineering 1982, Grenoble, 260.
  2. Willson, C. Grant; Ito, Hiroshi; Frechet, J. M. J. “L'amplification chimique appliquee au developpement de polymeres utilisables comme resines de lithographie,” Colloque Internationale sur la Microlithographie: Microcircuit Engineering 82 261 (1982)
  3. Willson, C. Grant; Ito, Hiroshi; Frechet, Jean M. J.; Houlihan, Frank. “Chemical Amplification in the Design of Polymers for Resist Applications,” International Union of Pure and Applied Chemistry 28 448 (1982)
  4. Willson, Grant C.; Ito, Hiroshi; Frechet, Jean M. J.; Tessier, Theodore G.; Houlihan, Francis M. “Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution,” J.Elecrochem.Soc. 133(1) 181-187 (1986)
  5. MacDonald, Scott A.; Willson, C. Grant; Frechet, Jean M. J. “Chemical Amplification in High-Resolution Imaging Systems,” Accounts of Chemical Research 27(6) 151-158 (1994)
Major Honors:
  • Fellow, IBM (1985)
  • Alexander von Humboldt Senior Scientist Award, FRG (1988)
  • ACS Award in the Chemistry of Materials (1991)
  • Elected member National Academy of Engineering (1992)
  • Malcolm E. Pruitt Award, Council for Chemical Research (1997)
  • National Academy of Sciences Award for Chemistry in Service to Society (1999)
  • Semiconductor Research Corporation Aristotle Award (1999)
  • Inaugural Fellow, ACS Division of Polymeric Materials:Science and Engineering (2000)
  • ACS Award in Applied Polymer Science (2004)
  • ACS Heroes of Chemistry Award (2005)
  • Fellow, International Society for Optics and Photonics (SPIE) (2007)
  • SEMI North America Award (2007)
  • National Medal of Technology and Innovation, USA (2007)
  • Gordon E. Moore Medal of the Electrochemical Society (2009)
  • Inaugural Fellow, American Chemical Society (2009)
  • Fellow, Materials Research Society (2012)

( At the time of receipt of the Prize )

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