Japan Prize Laureates

Laureates of the Japan Prize

Prof. C. Grant Willson

C. Grant Willson, Ph.D.

  • Nationality:
  • Date of Birth:
    30 March 1939

Outline of Achievements

Outline of Achievements

The 2013 Japan Prize

  • Field:
    Materials and Production
  • Achievement:
    Development of chemically amplified resist polymer materials for innovative semiconductor manufacturing process
  • Lecture:
    Chemistry for Lithography

Major Honors

1985 Fellow, IBM
1988 Alexander von Humboldt Senior Scientist Award, FRG
1991 ACS Award in the Chemistry of Materials
1992 Elected member National Academy of Engineering
1997 Malcolm E. Pruitt Award, Council for Chemical Research
1999 National Academy of Sciences Award for Chemistry in Service to Society
1999 Semiconductor Research Corporation Aristotle Award
2000 Inaugural Fellow, ACS Division of Polymeric Materials:Science and Engineering
2004 ACS Award in Applied Polymer Science
2005 ACS Heroes of Chemistry Award
2007 Fellow, International Society for Optics and Photonics (SPIE)
2007 SEMI North America Award
2007 National Medal of Technology and Innovation, USA
2009 Gordon E. Moore Medal of the Electrochemical Society
2009 Inaugural Fellow, American Chemical Society
2012 Fellow, Materials Research Society

Academic Degrees

1962 University of California, Berkeley BS in Chemistry
1969 California State University, San Diego MS in Organic Chemistry
1973 University of California, Berkeley PhD in Organic Chemistry

Professional Career

1973-1974 Assistant Professor, California State University, Long Beach
1974-1978 Assistant Professor, University of California, San Diego
1978-1993 IBM Fellow and Manager of the Polymer Science and Technology, IBM San Jose Research Center
1993-Present Professor of Chemistry and Chemical Engineering Rashid Engineering Regent's Chair
Department of Chemistry and Biochemistry McKetta Department of Chemical Engineering The University of Texas at Austin

Major Publications

  • Frechet, J. M. J. Ito, H. Willson, C. G. Sensitive Deep UV Resist Incorporating Chemical Amplification. Proceedings Microcircuit Engineering 1982, Grenoble, 260.
  • Willson, C. Grant; Ito, Hiroshi; Frechet, J. M. J. “L'amplification chimique appliquee au developpement de polymeres utilisables comme resines de lithographie,” Colloque Internationale sur la Microlithographie: Microcircuit Engineering 82 261 (1982)
  • Willson, C. Grant; Ito, Hiroshi; Frechet, Jean M. J.; Houlihan, Frank. “Chemical Amplification in the Design of Polymers for Resist Applications,” International Union of Pure and Applied Chemistry 28 448 (1982)
  • Willson, Grant C.; Ito, Hiroshi; Frechet, Jean M. J.; Tessier, Theodore G.; Houlihan, Francis M. “Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution,” J.Elecrochem.Soc. 133(1) 181-187 (1986)
  • MacDonald, Scott A.; Willson, C. Grant; Frechet, Jean M. J. “Chemical Amplification in High-Resolution Imaging Systems,” Accounts of Chemical Research 27(6) 151-158 (1994)
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