The 2013 Japan Prize

• Field:
  Materials and Production
• Achievement:
  Development of chemically amplified resist polymer materials for innovative semiconductor manufacturing process
• Lecture:
  Chemistry for Lithography

Major Honors

1985	Fellow, IBM
1988	Alexander von Humboldt Senior Scientist Award, FRG
1991	ACS Award in the Chemistry of Materials
1992	Elected member National Academy of Engineering
1997	Malcolm E. Pruitt Award, Council for Chemical Research
1999	National Academy of Sciences Award for Chemistry in Service to Society
1999	Semiconductor Research Corporation Aristotle Award
2000	Inaugural Fellow, ACS Division of Polymeric Materials:Science and Engineering
2004	ACS Award in Applied Polymer Science
2005	ACS Heroes of Chemistry Award
2007	Fellow, International Society for Optics and Photonics (SPIE)
2007	SEMI North America Award
2007	National Medal of Technology and Innovation, USA
2009	Gordon E. Moore Medal of the Electrochemical Society
2009	Inaugural Fellow, American Chemical Society
2012	Fellow, Materials Research Society

Academic Degrees

1962	University of California, Berkeley BS in Chemistry
1969	California State University, San Diego MS in Organic Chemistry
1973	University of California, Berkeley PhD in Organic Chemistry

Professional Career

1973-1974	Assistant Professor, California State University, Long Beach
1974-1978	Assistant Professor, University of California, San Diego
1978-1993	IBM Fellow and Manager of the Polymer Science and Technology, IBM San Jose Research Center
1993-Present	Professor of Chemistry and Chemical Engineering Rashid Engineering Regent's Chair Department of Chemistry and Biochemistry McKetta Department of Chemical Engineering The University of Texas at Austin

Major Publications

• Frechet, J. M. J. Ito, H. Willson, C. G. Sensitive Deep UV Resist Incorporating Chemical Amplification. Proceedings Microcircuit Engineering 1982, Grenoble, 260.
• Willson, C. Grant; Ito, Hiroshi; Frechet, J. M. J. “L'amplification chimique appliquee au developpement de polymeres utilisables comme resines de lithographie,” Colloque Internationale sur la Microlithographie: Microcircuit Engineering 82 261 (1982)
• Willson, C. Grant; Ito, Hiroshi; Frechet, Jean M. J.; Houlihan, Frank. “Chemical Amplification in the Design of Polymers for Resist Applications,” International Union of Pure and Applied Chemistry 28 448 (1982)
• Willson, Grant C.; Ito, Hiroshi; Frechet, Jean M. J.; Tessier, Theodore G.; Houlihan, Francis M. “Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution,” J.Elecrochem.Soc. 133(1) 181-187 (1986)
• MacDonald, Scott A.; Willson, C. Grant; Frechet, Jean M. J. “Chemical Amplification in High-Resolution Imaging Systems,” Accounts of Chemical Research 27(6) 151-158 (1994)